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Plasma techniques for film deposition

By: Konuma Mitsuharu.

Material type: Text

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TextPublisher: Harrow Alpha Science International 2005Description: ix,337p.ISBN: 1-84265-151-X.Subject(s): Plasma techniques | Thin-film technologyDDC classification: 621.38152

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ISI Library, Kolkata

621.38152 K82 (Browse shelf)

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