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The science and engineering of microelectronic fabrication/ Stephen A.Campbell

By: Material type: TextTextPublication details: New Delhi: Oxford University Press, 2010Edition: 2ndDescription: xiv,603p. Dig and Tables 24cmISBN:
  • 9780195681444
Subject(s): DDC classification:
  • 23 621.38152 C187
Contents:
An Introduction to Microelectronic Fabrication -- Semiconductor Substrates -- Diffusion -- Thermal Oxidation -- Ion Implantation -- Rapid Thermal Processing -- Optical Lithography -- Photoresists -- Nonoptical Lithographic Techniques -- Vacuum Science and Plasmas -- Etching -- Physical Deposition: Evaporation and Sputtering -- Chemical Vapor Deposition -- Epitaxial Growth -- Device Isolation, Contacts, and Metallization -- Cmos Techniques -- Gaas Technologies -- Silicon Bipolar Technologies -- MEMS -- Integrated Circuit Manufacturing
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Holdings
Item type Current library Call number Status Notes Date due Barcode Item holds
Books ISI Library, Kolkata 621.38152 C187 (Browse shelf(Opens below)) Available Gifted by Dr. Arijit De C27318
Total holds: 0

Includes Index

An Introduction to Microelectronic Fabrication -- Semiconductor Substrates -- Diffusion -- Thermal Oxidation -- Ion Implantation -- Rapid Thermal Processing -- Optical Lithography -- Photoresists -- Nonoptical Lithographic Techniques -- Vacuum Science and Plasmas -- Etching -- Physical Deposition: Evaporation and Sputtering -- Chemical Vapor Deposition -- Epitaxial Growth -- Device Isolation, Contacts, and Metallization -- Cmos Techniques -- Gaas Technologies -- Silicon Bipolar Technologies -- MEMS -- Integrated Circuit Manufacturing

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