TY  - BOOK
AU  - Bouchoule Andre
TI  - Dusty plasmas: physics, chemistry and technological impacts in plasma processing
SN  - 0-471-97386-6
U1  - 660.044 
PY  - 1999///
CY  - Chichester
PB  - John Wiley
KW  - Dust
KW  - Plasma chemistry
KW  - Plasma engineering
KW  - Plasma enhanced chemical vapor deposition
KW  - Plasma(Ionised gases)-industrial applications
ER  -