TY  - BOOK
AU  - Cheung Kin P
TI  - Plasma charging damage
SN  - 1-85233-144-5
U1  - 621.38152 
PY  - 2001///
CY  - London
PB  - Springer-Verlag
KW  - Metal oxide semiconductors-defects
KW  - Plasma radiation
KW  - Semiconductors-effect of radiation
ER  -