TY - BOOK AU - Esposito Pierpaolo AU - Ghoussoub Nassif AU - Guo Yujin TI - Mathematical analysis of partial differential equations modeling electrostatic MEMS SN - 978-0-8218-4957-6 U1 - 621 PY - 2010/// CY - Providence PB - AMS KW - Mathematical analysis KW - MEMS KW - Microelectromechanical systems-mathematical models ER -