TY  - BOOK
AU  - Campbell,Stephen A.
TI  - The science and engineering of microelectronic fabrication
SN  - 9780195681444
U1  - 621.38152 23
PY  - 2010///
CY  - New Delhi
PB  - Oxford University Press
KW  - Semiconductors--Design and construction
N1  - Includes Index; An Introduction to Microelectronic Fabrication -- Semiconductor Substrates -- Diffusion -- Thermal Oxidation -- Ion Implantation -- Rapid Thermal Processing -- Optical Lithography -- Photoresists -- Nonoptical Lithographic Techniques -- Vacuum Science and Plasmas -- Etching -- Physical Deposition: Evaporation and Sputtering -- Chemical Vapor Deposition -- Epitaxial Growth -- Device Isolation, Contacts, and Metallization -- Cmos Techniques --  Gaas Technologies --  Silicon Bipolar Technologies -- MEMS --  Integrated Circuit Manufacturing
ER  -